Calculating Surface Roughness for a Large Scale SEM Images by Mean of Image Processing

Calculating the surface topography of integrated circuit wafers from SEM images

The ability to make three-dimensional measurements of surface topography is important to the control of quality in the fabrication ofIC wafers. We describe a technique usingshape from shadingto produce a dense depth map from ICs imaged in the scanning electron microscope. The method minimises error terms to ensure the resultant surface is everywhere continuous and accurately explains the observ...

A PC-Based Interactive Image Processing System for 3-D Analysis of SEM Stereo Images

A PC-based interactive image processing system for 3-D analyses of stereo images of a scanning electron microscope (SEM) using an advanced feature-based stereo model is described. Integration between the global and qualitative human vision and the local and quantitative computer vision makes it possible to greatly reduce the computational load and to highly improve the reliability of stereo cor...

Estimation of Roughness Parameters of A Surface Using Different Image Enhancement Techniques (TECHNICAL NOTE)

Surface roughness measurement is widely used to estimate the quality of the product during manufacturing processes. It has a great importance in manufacturing fields such as ceramic tiles, glass, and iron. Many are using surface profile-meter with a contact stylus to measure the surface roughness of work piece. In the stylus method, a stylus is moved along the surface and the vertical movement ...

A Wavelet Toolbox for Large Scale Image Processing

The wavelet transform has proven to be a valuable tool for image processing applications, like image compression and noise reduction. In this paper we present a scheme to process very large images that do not fit in the memory of a single computer, based on the software library WAILI (Wavelets with Integer Lifting). Such images are divided into blocks that are processed quasi independently, all...

Surface Reconstruction From AFM and SEM Images